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On the Measurement of Total Elastic Cross-sections in the ESEM or VPSEM Using X-Ray Microanalysis

Published online by Cambridge University Press:  02 July 2020

Raynald Gauvin  and
David C. Joy
Raynald Gauvin
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, CanadaJ1K 2R1
David C. Joy
Affiliation:
EM Facility, University of Tennessee, Knoxville TN 37996-0810 and Oak Ridge National Laboratory, Oak Ridge, TN37831-6064
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Extract

It is of paramount importance to know the total elastic-scattering cross sections of the gases which are present in the specimen chamber of the variable pressure scanning electron microscope (VP-SEM) or in the environmental SEM (ESEM) since these values are needed to compute the width of the beam broadening skirt by the use of Monte Carlo simulations. However, these values are not well known for even the most common gases because the vibrational modes of the molecules add another contribution to the usual value of the elastic scattering cross-section. To overcome this difficulty a method has been proposed to measure total elastic cross-sections which is based on a measurement on the unscattered beam current as a function of the chamber pressure using a Faraday cup. The total elastic cross-sections are then deduced using the well-known exponential decay law.

Type
Working with ESEM and Other Variable Pressure Systems
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 788 - 789
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Phillips, M., Thoth, M. and Drouin, D. (1999), Microscopy and Microanalysis 5, suppl.2, 294–295CrossRefGoogle Scholar
2. Oak Ridge National Laboratory is operated by Lockheed Martin Energy Research Corporation for the U.S. Department of Energy under contract number DE-AC05-96OR22464.Google Scholar