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On the Calculation of SEM and FIB Beam Profiles

Published online by Cambridge University Press:  28 September 2015

Jolana Kološová ,
Tomáš Hrnčíř ,
Jaroslav Jiruše ,
Miroslav Rudolf  and
Jakub Zlámal
Jolana Kološová
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Tomáš Hrnčíř
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Jaroslav Jiruše
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Miroslav Rudolf
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, 623 00 Brno, Czech Republic
Jakub Zlámal
Affiliation:
Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 206 - 211
Copyright
Copyright © Microscopy Society of America 2015 

References

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[11] The authors acknowledge funding from FR-TI2/736 (MOREMIT) and the European Regional Development Fund (CEITEC-CZ.1.05/1.1.00/02.0068).Google Scholar