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The Observation of NBC Precipitates In Steels In The Nanometer Range Using A Field Emission Gun Scanning Electron Microscope

Published online by Cambridge University Press:  02 July 2020

Raynald Gauvin  and
Steve Yue
Raynald Gauvin
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Québec, CanadaJ1K 2R1.
Steve Yue
Affiliation:
Department of Mining and Metallurgical Engineering, McGill University, Montréal, Québec, CanadaH3A 2A7.
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Extract

The observation of microstructural features smaller than 300 nm is generally performed using Transmission Electron Microscopy (TEM) because conventional Scanning Electron Microscopes (SEM) do not have the resolution to image such small phases. Since the early 1990’s, a new generation of microscopes is now available on the market. These are the Field Emission Gun Scanning Electron Microscope with a virtual secondary electron detector. The field emission gun gives a higher brightness than those obtained using conventional electron filaments allowing enough electrons to be collected to operate the microscope with incident electron energy, E0, below 5 keV with probe diameter smaller than 5 nm. At 1 keV, the electron range is 60 nm in aluminum and 10 nm in iron (computed using the CASINO program). Since the electron beam diameter is smaller than 5 nm at 1 keV, the resolution of these microscopes becomes closer to that of TEM.

Type
Low Voltage SEM Imaging and Analysis for the Biological and Materials Sciences
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1243 - 1244
Copyright
Copyright © Microscopy Society of America 1997

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References

1.Gauvin, R., Hovington, P. and Drouin, D. (1995), “Quantification of Spherical Inclusions in the Scanning Electron Microscope Using Monte Carlo Simulations", Scanning, Vol. 17, pp. 202–219.10.1002/sca.4950170401CrossRefGoogle Scholar