Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-28T11:02:36.459Z Has data issue: false hasContentIssue false
  • English
  • Français

O+ PFIB Milling and Measurement of FIB Damage in Silicon

Published online by Cambridge University Press:  30 July 2020

Brandon van Leer  and
Lee Casalena
Brandon van Leer
Affiliation:
ThermoFisher Scientific, Hillsboro, Oregon, United States
Lee Casalena
Affiliation:
ThermoFisher Scientific, Hillsboro, Oregon, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 414 - 415
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Giannuzzi, L. A. et al. , Microscopy and Microanalysis 11, (2005).Google Scholar
Kelley, R.D., et al. , Microscopy and Microanalysis, 19 (Issue 2), (2013).10.1017/S1431927613006302CrossRefGoogle Scholar
Van Leer, B. et al. , Microscopy and Microanalysis 25 (Suppl 2), (2019).Google Scholar
Ziegler, J.F. and Biersack, J.P., SRIM 2003, www.SRIM.comGoogle Scholar