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Non-spectroscopic Method for Simultaneous Determination of Thickness and Composition via 4D-STEM

Published online by Cambridge University Press:  30 July 2020

Katsuaki Nakazawa ,
Kazutaka Mitsuishi ,
Shin-ichi Amma  and
Teruyasu Mizoguchi
Katsuaki Nakazawa
Affiliation:
Institute of Industrial Science, University of Tokyo, Meguro-ku, Tokyo, Japan
Kazutaka Mitsuishi
Affiliation:
National Institute for Materials Science, Tsukuba, Ibaraki, Japan
Shin-ichi Amma
Affiliation:
AGC Inc., Yokohama, Kanagawa, Japan
Teruyasu Mizoguchi
Affiliation:
Institute of Industrial Science, University of Tokyo, Meguro-ku, Tokyo, Japan

Abstract

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Type
Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM): New Experiments and Data Analyses for Determining Materials Functionality and Biological Structures
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 240 - 242
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Copyright
Copyright © Microscopy Society of America 2020

References

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Ophus, C., Microsc. Microanal. 563 (2019).Google Scholar