New Ultra-High Resolution SEM for Imaging by Low Energy Electrons

J. Jiruse; M. Havelka; J. Polster; F. Lopour

doi:10.1017/S1431927613008507

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Jiruše, Jaroslav Haničinec, Martin Havelka, Miloslav Hollricher, Olaf Ibach, Wolfram and Spizig, Peter 2014. Integrating focused ion beam–scanning electron microscope with confocal Raman microscope into a single instrument. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue. 6,

Jiruše, Jaroslav Havelka, Miloslav and Lopour, Filip 2014. Novel field emission SEM column with beam deceleration technology. Ultramicroscopy, Vol. 146, Issue. , p. 27.

Vana, R. Kocman, M. and Jiruse, J. 2015. Correlative SEM and Raman imaging of hot spots on SERS substrate. Microscopy and Microanalysis, Vol. 21, Issue. S3, p. 153.

Jiruše, Jaroslav Havelka, Miloslav and Polster, Jan 2016. European Microscopy Congress 2016: Proceedings. p. 404.

Jiruse, Jaroslav Havelka, Miloslav and Polster, Jan 2016. Design of an Ultra-High Resolution SEM for Enhanced Analysis. Microscopy and Microanalysis, Vol. 22, Issue. S3, p. 578.

Havelka, Miloslav Jiruse, Jaroslav Hrncif, Tomas Jan Polster Vana, Rostislav and Zachej, Samuel 2018. S9000X - Next Generation of Ultra-High Resolution SEM for Enhanced Analysis and Xe Plasma FIB for Ultra-Fast and Gentle Sputtering. Microscopy and Microanalysis, Vol. 24, Issue. S1, p. 1116.

Jiruše, Jaroslav Košťál, Vratislav and Lencová, Bohumila 2019. Biological Field Emission Scanning Electron Microscopy. p. 79.

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New Ultra-High Resolution SEM for Imaging by Low Energy Electrons

Abstract

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