Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-02T21:22:11.288Z Has data issue: false hasContentIssue false

A New Tool for Automation of Focused Ion Beam Bitmap Milling of Two-and Three-Dimensional Micro and Nanostructures.

Published online by Cambridge University Press:  22 July 2022

Jairo Narro
Affiliation:
Department of Bioengineering, University of Engineering and Technology, Lima, Peru
Rosa Diaz
Affiliation:
Birck Nanotechnology Center, Purdue University, West Lafayette, IN, United States

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
On Demand - Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Copyright
Copyright © Microscopy Society of America 2022

References

Tseng, A. A., J. Micromech. Microeng. 14 (2004), p. 15. doi: 10.1088/0960-1317/14/4/R01CrossRefGoogle Scholar
Li, P. et al. , Nanoscale 13 (2021), p. 1529. doi: 10.1039/D0NR07539FCrossRefGoogle ScholarPubMed
De Felicis, D. et al. , Micron 101 (2017), p. 8. doi: 10.1016/j.micron.2017.05.005CrossRefGoogle Scholar
Chen, X. et al. , SN Appl. Sci. 2 (2020), p. 758. doi: 10.1007/s42452-020-2456-2CrossRefGoogle Scholar
Lalev, G. et al. , Journal of Engineering Manufacture 222 (2008), p. 67. doi: 10.1243/09544054JEM864.CrossRefGoogle Scholar
Han, T. et al. , 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 662. doi: 10.1109/MEMS51782.2021.9375344.CrossRefGoogle Scholar
Kim, H.-B. et al. , Nanotechnology 18 (2007), p. 245303. doi: 10.1088/0957-4484/18/24/245303CrossRefGoogle Scholar