Crossref Citations
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Junge, Felix
Auge, Manuel
and
Hofsäss, Hans
2022.
Sputter hot filament hollow cathode ion source and its application to ultra-low energy ion implantation in 2D materials.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,
Vol. 510,
Issue. ,
p.
63.
Auge, M.
Junge, F.
and
Hofsäss, H.
2022.
Laterally controlled ultra-low energy ion implantation using electrostatic masking.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,
Vol. 512,
Issue. ,
p.
96.