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New Results with Next Generation Solid State Backscattered Electron Detectors

Published online by Cambridge University Press:  23 November 2012

A. Liebel ,
H. Soltau ,
R. Eckhardt ,
O. Jaritschin ,
A. Niculae  and
F. Schopper
A. Liebel
Affiliation:
PNSensor GmbH, Munich, Germany
H. Soltau
Affiliation:
PNSensor GmbH, Munich, Germany
R. Eckhardt
Affiliation:
PNSensor GmbH, Munich, Germany
O. Jaritschin
Affiliation:
PNDetector GmbH, Munich, Germany
A. Niculae
Affiliation:
PNDetector GmbH, Munich, Germany
F. Schopper
Affiliation:
MPI Halbleiterlabor, Munich, Germany
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1206 - 1207
Copyright
Copyright © Microscopy Society of America 2012

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