New Multifunctional Detector Unit for SEM

Extract

In order to increase analytical capabilities of SEM we have developed a multifunctional detector unit, which allows the simultaneous and highly efficient registration of the information from the chosen area of the specimen using backscattered electrons (BSE) and cathodoluminescent (CL) radiation. At the same time secondary electrons (SE) could be collected by the regular Everhart - Thornley detector. Thus, the unit allows to perform microstructural investigations in three modes of SEM operation simultaneously - BSE, CL and SE. A schematic diagram of the unit is presented in Fig. 1.

In the plate made of scintillating material, and installed between the pole piece of SEM and the specimen, the bottom side is a part of spherical surface. The surface covers completely the whole top surface of the specimen and collects BSE and CL radiation in the solid angle ∼2 π sr.