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New Electron Holographic Technique for the Measurement of Strain at the Nanoscale: Application to Electronic Devices and Multilayers

Published online by Cambridge University Press:  01 August 2010

E Snoeck ,
F Houdellier ,
F Hüe  and
MJ Hÿtch
E Snoeck
Affiliation:
Centre National de la Recherche Scientifique, France
F Houdellier
Affiliation:
Centre National de la Recherche Scientifique, France
F Hüe
Affiliation:
Centre National de la Recherche Scientifique, France
MJ Hÿtch
Affiliation:
Centre National de la Recherche Scientifique, France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 588 - 589
Copyright
Copyright © Microscopy Society of America 2010