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New Detection Principles on the GEMINI SUPRA FE-SEM

Published online by Cambridge University Press:  16 July 2003

Heiner Jaksch ,
Michael Steigerwald ,
Volker Drexel  and
Hans Bihr
Heiner Jaksch
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss SMT AG, D-73446 Oberkochen, Germany
Michael Steigerwald
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss SMT AG, D-73446 Oberkochen, Germany
Volker Drexel
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss SMT AG, D-73446 Oberkochen, Germany
Hans Bihr
Affiliation:
LEO Electron Microscopy Group, Carl Zeiss SMT AG, D-73446 Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 946 - 947
Copyright
Copyright © Microscopy Society of America 2003