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Narrow-Beam Argon Ion Milling of Carbon-Supported Ex Situ Lift-Out FIB Specimens

Published online by Cambridge University Press:  04 August 2017

M.J. Campin ,
C.S. Bonifacio ,
H.H. Kang ,
P. Nowakowski ,
M. Boccabella  and
P.E. Fischione
M.J. Campin
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
H.H. Kang
Affiliation:
Center for Complex Analysis, GLOBALFOUNDRIES, Malta, NY, USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
M. Boccabella
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments, Inc., Export, PA,USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 302 - 303
Copyright
© Microscopy Society of America 2017 

References

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[3] Muehle, U, et al in Microscopy: Science, technology, applications and education (eds. A Mendez-Vilas & J DiazFORMATEX Badajozp. 1704.Google Scholar
[4] Kang, HH, et al, Conf. Proc. Int. Symp. Test. Failure Anal 2010). p. 102.Google Scholar