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The NanoWorkstation: Complementing FIB-SEM Tools with Micromanipulators

Published online by Cambridge University Press:  01 August 2018

Andrew J. Smith ,
Andreas Rummel ,
Matthias Kemmler ,
Klaus Schock  and
Stephan Kleindiek
Andrew J. Smith
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 846 - 847
Copyright
© Microscopy Society of America 2018 

References

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[3] Kleindiek, S US Patent US5568004 A (1996).Google Scholar
[4] Lin, Y, Li, Q, Armstrong, A Wang, GT Solid State Communications 149 2009) p. 1608.Google Scholar