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NanoSIMS 50: Recent Results and Intrumental Development in Submicron Isotopic and Elemental Analysis

Published online by Cambridge University Press:  02 July 2020

Francois Horreard ,
Francois Hillion  and
Dr. Cecile Fournier
Francois Horreard
Affiliation:
CAMECA, 103 Bd Saint Denis, 92403Courbevoie, France.
Francois Hillion
Affiliation:
CAMECA, 103 Bd Saint Denis, 92403Courbevoie, France.
Dr. Cecile Fournier
Affiliation:
CAMECA, 103 Bd Saint Denis, 92403Courbevoie, France.
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Abstract

Secondary Ion Mass Spectrometry (SIMS) has unique features that makes this technique a very attractive candidate for sub-micron analysis: high elemental sensitivity (ppm or better) if reactive primary ions are used ; isotopic analysis capability ; possible insulator analysis ; no sample preparation needed ; small probed depth (a few run) and small interaction volume (cascade collision dia. < 10 nm).

Similar to a SEM microscope, a beam of Cs+ or O− primary ions is focused and rastered on the surface of the sample. The ions sputtered by this primary beam are collected, and this secondary ion beam is shaped in order to be mass filtered by a magnetic sector mass analyzer. Five mass selected images can be simultaneously recorded, originating from the exact same sputtered volume, ensuring reliable isotopic ratio and perfect image registration.

Based on Pr. Slodzian and al. [1, 2] original design, the commercial version of the NANOSIMS 50 ion microprobe incorporates several new developments in order to improve performances:

Type
Corporate Session (Organized by M. Kersker)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 890 - 891
Copyright
Copyright © Microscopy Society of America 2001

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References

1. Slodzian, G., Daigne, B., Girard, F., Boust, F., High Sensitivity and High Spatial Resolution Ion Probe Instrument, Proceedings of the 6th SIMS Conference, Versailles sept. 87.Google Scholar

2. Hiliion, F., Daigne, B., Girard, F., Slodzian, G., A new high performance instrument: The Cameca Nanosims 50, Proceedings of the 9th SIMS Conference, Yokohama nov. 93.Google Scholar