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Nanoscale Tomographic Imaging using Focused Ion Beam Sputtering, Secondary Electron Imaging and Secondary Ion Mass Spectrometry

Published online by Cambridge University Press:  02 July 2020

Robert Hull ,
Derren Dunn  and
Alan Kubis
Robert Hull
Affiliation:
University of Virginia, Department of Materials Science and Engineering, 116 Engineers Way, Charlottesville, VA, 22904
Derren Dunn
Affiliation:
Now at IBM, 2070 Route 52, Hopewell Junction, NY, 12533
Alan Kubis
Affiliation:
University of Virginia, Department of Materials Science and Engineering, 116 Engineers Way, Charlottesville, VA, 22904
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Abstract

As the importance of nano-scaled structures in both science and engineering increases, techniques for reconstructing three-dimensional structural, crystallographic and chemical relationships become increasingly important. in this paper we described a technique which uses focused ion beam (FIB) sputtering to expose successive layers of a 3D sample, coupled with secondary electron imaging and secondary ion mass spectrometry of each sputtered surface. Computer interpolation of these different slice images then enables reconstruction of the 3D structure and chemistry of the sample. These techniques are applicable to almost any inorganic material, at a spatial resolution of tens of nanometers, and fields of view up to (tens of μm).

The FIB instrument used in this study is an FEI 200 with a minimum ion probe diameter < 10 nm, an ion current density ∼ 10 A/cm2, a maximum ion current of 11 nA, and a standard Ga+ ion energy of 30 keV. Our instrument is equipped with a continuous dynode electron multiplies (CDEM) for secondary electron imaging and a quadrupole mass spectrometer for secondary ion mass spectroscopy (SIMS) / element specific mapping. Gallium ions of this energy will ablate any material, with sputter yields typically of order ten, corresponding to a material removal rate of order 1 μm3nA−1s−1.

Type
Applications and Developments of Focused Ion Beam (FIB) Instruments (Organized by L. Giannuzzi)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 934 - 935
Copyright
Copyright © Microscopy Society of America 2001

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References

references

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5. We gratefully acknowledge provision of the via structures in Figure 1 by Gillmer, G. and Case, C. of Bell Laboratories, and the precipitate colony structures of Figure 2 by G. Shiflet of UVa.Google Scholar