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Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope

Published online by Cambridge University Press:  25 July 2016

Nico Klingner ,
Gregor Hlawacek ,
Rene Heller ,
Johannes von Borany  and
Stefan Facsko
Nico Klingner
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden Rossendorf, Dresden, Germany
Gregor Hlawacek
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden Rossendorf, Dresden, Germany
Rene Heller
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden Rossendorf, Dresden, Germany
Johannes von Borany
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden Rossendorf, Dresden, Germany
Stefan Facsko
Affiliation:
Institute for Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden Rossendorf, Dresden, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 618 - 619
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Hlawacek, G., et al, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 32 (2014). p. 020801.Google Scholar
[2] Ramachandra, R., Griffin, B. J. & Joy, D. C. Ultramicroscopy 109 (2009). p. 748.Google Scholar
[3] Veligura, V., et al, Journal of Luminescence 157 (2015). p. 321.CrossRefGoogle Scholar
[4] Wirtz, T., et al, Nanotechnology 26 (2015). p. 434001.CrossRefGoogle Scholar
[5] Klingner, N., et al, Ultramicroscopy accepted (2015).Google Scholar