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Nano Factory Achieved by Focused Ion Beam

Published online by Cambridge University Press:  01 August 2005

T Fujii  and
T Kaito
T Fujii
Affiliation:
SII NanoTechnology Inc.
T Kaito
Affiliation:
SII NanoTechnology Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 810 - 811
Copyright
© 2005 Microscopy Society of America