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Multivariate Analysis and Compressed Sensing Methods for Spectroscopic Electron Tomography of Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

Martin Jacob ,
Toby Sanders ,
Nicolas Bernier ,
Adeline Grenier ,
Rafael Bortolin Pinheiro ,
Frederic Mazen ,
Pascale Bayle-Guillemaud  and
Zineb Saghi
Martin Jacob
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Toby Sanders
Affiliation:
School of Mathematical and Statistical Sciences, Arizona State University, Tempe, AZ, USA
Nicolas Bernier
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Adeline Grenier
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Rafael Bortolin Pinheiro
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Frederic Mazen
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
Pascale Bayle-Guillemaud
Affiliation:
Univ. Grenoble Alpes, CEA, INAC, Grenoble, France
Zineb Saghi
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 500 - 501
Copyright
© Microscopy Society of America 2018 

References

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[5] Gilbert, PFC Journal of Theoretical Biology 36 1972) p. 105.Google Scholar