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Multi-Species Focused Ion Beam Processing for III-V Semiconductor Materials

Published online by Cambridge University Press:  23 November 2012

B.P. Gila ,
B.R. Appleton ,
J. Fridmann ,
J.E. Sanabia  and
P. Mazarov
B.P. Gila
Affiliation:
University of Florida, Gainesville, FL
B.R. Appleton
Affiliation:
University of Florida, Gainesville, FL
J. Fridmann
Affiliation:
RaithUSA, Ronkonkoma, NY
J.E. Sanabia
Affiliation:
RaithUSA, Ronkonkoma, NY
P. Mazarov
Affiliation:
Raith, Dortmund, Germany
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 616 - 617
Copyright
Copyright © Microscopy Society of America 2012

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