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Multislice Imaging of Integrated Circuits by X-ray Ptychography

Published online by Cambridge University Press:  10 August 2018

Kei Shimomura ,
Makoto Hirose ,
Takaya Higashino  and
Yukio Takahashi
Kei Shimomura*
Affiliation:
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka565-0871, Japan RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo, Hyogo679-5198, Japan
Makoto Hirose
Affiliation:
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka565-0871, Japan RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo, Hyogo679-5198, Japan
Takaya Higashino
Affiliation:
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka565-0871, Japan RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo, Hyogo679-5198, Japan
Yukio Takahashi
Affiliation:
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka565-0871, Japan RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo, Hyogo679-5198, Japan
*
*Corresponding author: [email protected]

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 24 - 25
Copyright
© Microscopy Society of America 2018 

References

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