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Monte Carlo Simulation of Electron Scattering for Arbitrary 3D Structures Using A Multi-Quadtree Geometry Representation

Published online by Cambridge University Press:  02 July 2020

C.O. Schiebl  and
V. Ambrose
C.O. Schiebl
Affiliation:
MCS Consulting, Prof. Leopold Hauer-Gasse 7, A-3552, Lengenfeld, Austria
V. Ambrose
Affiliation:
Compaq Computer Corporation, 334 South Street, SHR3-2E/S25, Shrewsbury, MA01545-4112
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In the semiconductor industry the importance of Computer Aided Materials Analysis (CAMA) is growing rapidly due to ever decreasing feature sizes on semiconductor wafers. Due to the fact that the excitation volume is often larger than the typical feature size on a processed state-of-the-art semiconductor wafer it was necessary to extend SeSAME, a Monte Carlo simulator for arbitrary 2- dimensional geometries, to be able to handle arbitrarily shaped 3-dimensional structures. This is achieved by using a so called multi-quadtree approach for the discretization of 3-dimensional geometries.

A multi-quadtree consists of several parallel arranged modified quadtrees. This means, an arbitrarily shaped 3-dimensional structure is divided into parallel slices of constant geometry in direction perpendicular to the quadtree plane. The number of such 2-dimensional slices and the thickness of these slices is solely limited by the available memory. Therefore, really 3-dimensional structures may be resolved in principal with any resolution.

Type
Mas Celebrates: Fifty Years of Electron Probe Microanalysis
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 608 - 609
Copyright
Copyright © Microscopy Society of America

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References

1.Schiebl, C.O.et.alMikrochim. Acta [Suppl] 13, (1996) 533Google Scholar
2.Preparata, F.P., Computational Geometry, Springer, Berlin Heidelberg New York Tokyo (1985)CrossRefGoogle Scholar