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Modeling Image Distortions in 3DAP

Published online by Cambridge University Press:  01 June 2004

F. Vurpillot ,
A. Cerezo ,
D. Blavette  and
D.J. Larson
F. Vurpillot
Affiliation:
Groupe de Physique des Materiaux, Unite Mixte de Recherche, CNRS 6634, Université de Rouen, 76801 Saint Etienne du Rouvray cedex, France
A. Cerezo
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, UK
D. Blavette
Affiliation:
Groupe de Physique des Materiaux, Unite Mixte de Recherche, CNRS 6634, Université de Rouen, 76801 Saint Etienne du Rouvray cedex, France
D.J. Larson
Affiliation:
Recording Head Operations, Seagate Technology, Minneapolis, MN 55435, USA
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Abstract

A numerical model has been developed to simulate images obtained from the three-dimensional atom probe. This model was used to simulate the artefacts commonly observed in two-phase materials. This model takes into account the dynamic evolution of the atomic-scale shape of the specimen during field evaporation. This article reviews the model and its applications to some specific cases. Local magnification effects were studied as a function of the size, the shape, and the orientation of precipitated phases embedded in the matrix. Small precipitates produce large aberrations in good agreement with experiments. The magnification from such precipitates, as measured from the simulation, is only found to match the theoretical value for mesoscopic scale precipitates (size similar to the specimen size). Orientation effects are also observed in excellent agreement with experiments. The measured thickness of a grain-boundary-segregated film in the simulation is found to decrease with the angle between the normal to the grain boundary and the tip axis. Depth scaling artefacts caused by variation in the evaporation field of atoms in multilayer structures were successfully simulated and again showed good agreement with effects observed experimentally.

Keywords

atom probesimulationmultilayers
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 3 , June 2004 , pp. 384 - 390
Copyright
© 2004 Microscopy Society of America

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