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Misfit Dislocation Core Structures At Ba0.5 Sr0.5TiO3 /LaAlO3 Interfaces

Published online by Cambridge University Press:  02 July 2020

H-J. Gao ,
B. Rafferty ,
C.L. Chen ,
R.K. Singh  and
S.J. Pennycook
H-J. Gao
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN37831-6030
B. Rafferty
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN37831-6030
C.L. Chen
Affiliation:
Department of Physics, Texas Center for Superconductivity, University of Houston, Houston, Texas77204
R.K. Singh
Affiliation:
Department of Material Science & Engineering, University of Florida, Gainesville, FL32611
S.J. Pennycook
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN37831-6030
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Extract

The trend of replacing trench and stack capacitors in a dynamic random access memory (DRAM) with a planar configuration has stimulated the development of high dielectric constant materials with reliably low leakage current and high dielectric breakdown strength. In this regard, high dielectric constant materials, such as PbZrxTiyO3(PZT), BaTiO3, SrTiO3, PbTiO3, and BaxSr1-xTiO3, have been extensively investigated as dielectrics in the last few decades. Of these, the sol id-solution quaternary BaxSr1-xTiO3, (BST) combines the high dielectric constant of BaTiO3, with the structural stability of SrTiO3, is one of the most promising materials for DRAM cells in very large-scale integrated circuits. BST shows a paraelectric phase for x<0.7 at room temperature, which provides additional features such as no aging or fatigue effects from ferroelectric domain switching. However, so far, there have been few studies of the interfaces between BST and the substrates, particularly at the atomic-resolution level.

Type
Compositional Imaging and Spectroscopy
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 612 - 613
Copyright
Copyright © Microscopy Society of America

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