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Minimize Electron Beam Damage during Characterization of Carbon-Depletion in Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping

Published online by Cambridge University Press:  25 July 2016

Wayne W. Zhao  and
Michael Gribelyuk
Wayne W. Zhao
Affiliation:
Center for Complex Analyses, GLOBALFOUNDRIES, Malta, New York, USA.
Michael Gribelyuk
Affiliation:
Advanced Technology Development, GLOBALFOUNDRIES, Malta, New York, USA.

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 334 - 335
Copyright
© Microscopy Society of America 2016 

References

References:

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