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Miniature Electron Beam Columns: From the Lab to the Field

Published online by Cambridge University Press:  25 July 2016

Lawrence Muray ,
Scott Davilla  and
James Spallas
Lawrence Muray
Affiliation:
Keysight Technologies, Inc. Nano Scale Sciences Division , Santa Clara, CA, USA
Scott Davilla
Affiliation:
Keysight Technologies, Inc. Nano Scale Sciences Division, Santa Clara, CA, USA
James Spallas
Affiliation:
Keysight Technologies, Inc. Nano Scale Sciences Division, Santa Clara, CA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 580 - 581
Copyright
© Microscopy Society of America 2016 

References

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[3] Spallas, J., Silver, C., Muray, L., Wells, T. & El Gomati, M. Microelectron. Eng 83, 984–989, 2006.Google Scholar
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