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Microstructure of TiAlNiAu ohmic contacts for N-polar GaN/AlGaN HEMTs

Published online by Cambridge University Press:  23 November 2012

L. Zhou ,
M. Johnson ,
D. Smith ,
D. Storm ,
D. Meyer  and
D. Katzer
L. Zhou
Affiliation:
Arizona State University, Tempe, AZ
M. Johnson
Affiliation:
Arizona State University, Tempe, AZ
D. Smith
Affiliation:
Arizona State University, Tempe, AZ
D. Storm
Affiliation:
Naval Research Laboratory, Washington DC, DC
D. Meyer
Affiliation:
Naval Research Laboratory, Washington DC, DC
D. Katzer
Affiliation:
Naval Research Laboratory, Washington DC, DC
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1802 - 1803
Copyright
Copyright © Microscopy Society of America 2012

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