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Microstructure of Pulsed-Laser Deposited Titanium Carbide Thin Films Grown for Tribological Applications

Published online by Cambridge University Press:  02 July 2020

P. M. Adams  and
G. Radhakrishnan
P. M. Adams
Affiliation:
The Aerospace Corporation, P. O. Box 92957, Los Angeles, CA90009
G. Radhakrishnan
Affiliation:
The Aerospace Corporation, P. O. Box 92957, Los Angeles, CA90009
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Abstract

The carbides and nitrides of transition metals, are excellent candidates for hard coatings for tribological applications. Recently a novel pulsed laser deposition (PLD) technique has been developed for the room temperature growth of particulate free titanium carbide (TiC) coatings on bearing steels. On a completely different scale from ball bearing applications, moving microelectricalmechanical systems (MEMS) face issues of limited lifetime as a result of rapid wear of the silicon components. The integration of hard tribological coatings into moving MEMS structures should greatly increase the functional lifetime of these devices. The same PLD technique has been used to deposit TiC thin film onto MEMS test structures consisting of multilayer coatings on Si substrates, and patterned 3-D Si substrates. This procedure for growing TiC appears to be compatible with conventional MEMS fabrication procedures.

Type
Thin Films & Coatings
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1238 - 1239
Copyright
Copyright © Microscopy Society of America 2001

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References

References:

1.Radhakrishnan, G. and Adams, P. M., Applied Phyics A 69 (1999) S33–S38Google Scholar
2.Radhakrishnan, G., Adams, P. M., Robertson, R. and Cole, R., Tribology Letters 8 (2000) 133–137CrossRefGoogle Scholar