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Microstructure of Copper Films and its Oxides Prepared by Electron Beam Evaporation and ECR Plasmon Oxidation

Published online by Cambridge University Press:  02 July 2020

M.J. Campin ,
J.C. Barbour ,
J.W. Braithwaite  and
Jane G. Zhu
M.J. Campin
Affiliation:
Department of Physics,New Mexico State University, Las Cruces, New Mexico88003
J.C. Barbour
Affiliation:
Sandia National Laboratory, Albuquerque, New Mexico87108
J.W. Braithwaite
Affiliation:
Sandia National Laboratory, Albuquerque, New Mexico87108
Jane G. Zhu
Affiliation:
Department of Physics,New Mexico State University, Las Cruces, New Mexico88003
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Abstract

The corrosion of copper is an important area in materials science because of the widespread use of copper in structural devices and electronics. These widespread uses in conjunction with its thermodynamic instability in most atmospheric conditions have prompted numerous atmospheric copper corrosion studies. The goal of these investigations has been to identify the underlying mechanisms by which corrosion proceeds in order to prevent any detrimental corrosion effects. Despite these studies, the microstructure of copper and its oxides remains poorly understood. Therefore, our investigation is concentrated on determining this microstructure.

In our investigation, copper films are electron-beam evaporated onto SiO2 coated Si wafers and then exposed to an electron-cyclotron-resonance (ECR) O2 plasma, which simulates an aggressive oxidizing environment. The ECR-grown oxide is fully oxidized to CuO at the surface and changes to CU2O further into the sample. The thickness of the oxide layer is controlled by the sample exposure time to the ECR plasma.

Type
Oxidation/Corrosion
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1280 - 1281
Copyright
Copyright © Microscopy Society of America 2001

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References

references

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