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Microstructure of compositionally graded TiAlSiN thin films investigated by conventional and HRTEM

Published online by Cambridge University Press:  05 September 2003

M. Parlinska-Wojtan  and
A. Karimi
M. Parlinska-Wojtan
Affiliation:
IPMC, FSB, Swiss Science and Technology University (EPFL), CH-1015, Lausanne, SWITZERLAND
A. Karimi*
Affiliation:
IPMC, FSB, Swiss Science and Technology University (EPFL), CH-1015, Lausanne, SWITZERLAND
*
1Corresponding Author: Dr. A. Karimi, e-mail: [email protected]
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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 262 - 263
Copyright
Copyright © Microscopy Society of America 2003

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