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Microscopic Studies of Dual Phase Amorphous/Microcrystalline Silicon Prepared by the Saddle-Field Glow Discharge Deposition Method with Hydrogen Dilution

Published online by Cambridge University Press:  01 August 2004

Tatiana Allen
Affiliation:
University of Tennessee Chattanooga
Davit Yeghikyan
Affiliation:
University of Toronto, Canada
Keith Leong
Affiliation:
University of Toronto, Canada
Nazir Kherani
Affiliation:
University of Toronto, Canada
William Roes
Affiliation:
Tennessee Valley Authority, Chattanooga, Tennessee
Stefan Zukotynski
Affiliation:
University of Toronto, Canada
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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