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Micromachined Platforms for Microscopic Measurements

Published online by Cambridge University Press:  01 August 2003

D. R. Sandison ,
M. S. Baker ,
D. J. Bennett ,
C. D. James ,
P. C. Galambos ,
S. S. Mani  and
M. Okandan
D. R. Sandison
Affiliation:
MEMS Device Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
M. S. Baker
Affiliation:
MEMS Device Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
D. J. Bennett
Affiliation:
MEMS Device Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
C. D. James
Affiliation:
MEMS Device Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
P. C. Galambos
Affiliation:
MEMS Device Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
S. S. Mani
Affiliation:
MEMS and Novel Silicon Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185
M. Okandan
Affiliation:
MEMS and Novel Silicon Technologies, Sandia National Laboratories, PO Box 5800/MS1080, Albuquerque, NM, 87185

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 168 - 169
Copyright
Copyright © Microscopy Society of America 2003