Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-28T15:17:11.491Z Has data issue: false hasContentIssue false
  • English
  • Français

Microcalorimeter EDS: Benefits and Drawbacks

Published online by Cambridge University Press:  02 July 2020

D. A. Wollman ,
Dale E. Newbury ,
S. W. Nam ,
G. C. Hilton ,
K. D. Irwin ,
D. A. Rudman ,
S. Deiker ,
N. F. Bergren  and
John M. Martinis
D. A. Wollman
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
Dale E. Newbury
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD20899
S. W. Nam
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
G. C. Hilton
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
K. D. Irwin
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
D. A. Rudman
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
S. Deiker
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
N. F. Bergren
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
John M. Martinis
Affiliation:
National Institute of Standards and Technology, Boulder, CO80303
Get access

Extract

The commercial introduction of high-count-rate, near-room-temperature silicon drift detectors (presently available) and high-energy-resolution cryogenic microcalorimeters (forthcoming) is an exciting development in x-ray microanalysis, in which detector choices and capabilities have been essentially stable for many years. Both of these new energy-dispersive detectors promise improved capabilities for specific applications, e.g., faster EDS mapping (silicon drift detectors) and nanoscale particle analysis (microcalorimeters). In this paper, we briefly examine some of the important benefits and drawbacks of microcalorimeter EDS (μcal EDS) for x-ray microanalysis.

The primary benefit of μcal EDS over conventional semiconductor EDS is the factor of ∼ 20 improvement in energy resolution (∼ 4 eV, real-time analog signal processing), as shown in Figure 1.

Type
New Detectors—Benefits and Drawbacks
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 738 - 739
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

References:

1.Struder, L. et al., Microsc. Microanal. 4 (Suppl. 2: Proceedings) (1998) 176.CrossRefGoogle Scholar
2.Wollman, D. A. et al., J. Microscopy 188 (1997) 196.CrossRefGoogle Scholar
3.Wollman, D. A. et al., in Characterization and Metrology for ULSI Technology (1998) 799.CrossRefGoogle Scholar
4.Nam, S. W. et al., these proceedings.Google Scholar
5. Contribution of the U.S. Government; not subject to copyright.Google Scholar