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Methods for Structuring and Prototyping on a Nanoscale Using a DualBeam

Published online by Cambridge University Press:  01 August 2005

F Morrissey ,
S Reyntjens ,
K Nakahara  and
C Jiao
F Morrissey
Affiliation:
FEI Company
S Reyntjens
Affiliation:
FEI Company
K Nakahara
Affiliation:
FEI Company
C Jiao
Affiliation:
FEI Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 820 - 821
Copyright
© 2005 Microscopy Society of America