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A Method for Thinning FIB Prepared TEM Specimens after Lift-Out

Published online by Cambridge University Press:  02 July 2020

B. B. Rossie ,
T. L. Shofner ,
S. R. Brown ,
S. D. Anderson ,
M. M. Jamison  and
F. A. Stevie
B. B. Rossie
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
T. L. Shofner
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
S. R. Brown
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
S. D. Anderson
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
M. M. Jamison
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
F. A. Stevie
Affiliation:
Agere Systems, 9333 South John Young Parkway, Orlando, Florida, 32819
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Abstract

Advantages of the FIB lift-out technique over traditional H-bar TEM specimen preparation have been recognized. The ability to rapidly (< 1 hour) prepare a site specific TEM specimen without destroying the entire bulk specimen has led to a wide spread reliance on this method. The main disadvantage of this technique is an inability to accomplish additional membrane thinning if required. Traditional H-bar preparation allows additional thinning. However, mechanical polishing is time consuming and the bulk sample is destroyed. A method has been developed which combines the efficient, site specific advantages of the lift-out method with the H-bar's ability to accomplish additional thinning. in this procedure a lift-out specimen is removed from the bulk sample and mounted onto a half-grid in a configuration similar to that employed by the H-bar technique.

A 1.0-micron thick lift-out specimen was prepared using a FEI Strata DB-235 FIB dual-beam workstation by sputtering away bulk material leaving a thin membrane containing a desired feature (FIG 1).

Type
Applications and Developments of Focused Ion Beam (FIB) Instruments (Organized by L. Giannuzzi)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 940 - 941
Copyright
Copyright © Microscopy Society of America 2001

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References

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