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Measuring Local Thickness Through Small-Tilt Fringe Visibility

Published online by Cambridge University Press:  01 August 2005

E Mandell ,
P Fraundorf  and
W Qin
E Mandell
Affiliation:
University of Missouri-St. Louis
P Fraundorf
Affiliation:
University of Missouri-St. Louis
W Qin
Affiliation:
Advanced Products R&D Lab, Freescale Semiconductor Inc., Chandler, Arizona

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 562 - 563
Copyright
© 2005 Microscopy Society of America