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Measurement of LER in Poly-Silicon Gates in MOSFETS by (S)TEM

Published online by Cambridge University Press:  01 August 2005

J Bruley ,
T Kane  and
S Boettcher
J Bruley
Affiliation:
IBM Server and Technology Group, Hopewell Junction, New York
T Kane
Affiliation:
IBM Server and Technology Group, Hopewell Junction, New York
S Boettcher
Affiliation:
IBM Server and Technology Group, Hopewell Junction, New York

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2092 - 2093
Copyright
© 2005 Microscopy Society of America