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Maskless Fabrication of Highly-Ordered Periodic Nanopillars using FIB and Bitmap Control

Published online by Cambridge University Press:  01 August 2005

W Zhou ,
H Qian  and
L Wang
W Zhou
Affiliation:
Nanyang Technological University,Singapore
H Qian
Affiliation:
Nanyang Technological University,Singapore
L Wang
Affiliation:
University of Michigan at Ann Arbor

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 822 - 823
Copyright
© 2005 Microscopy Society of America