Marriage Of Focused and Broad Ion Beam: Sample Preparation Optimized for High Performance Analytical (S)TEM

Max V. Sidorov

doi:10.1017/S1431927602105472

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Marriage Of Focused and Broad Ion Beam: Sample Preparation Optimized for High Performance Analytical (S)TEM

Published online by Cambridge University Press: 01 August 2002

Max V. Sidorov

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Max V. Sidorov*: Affiliation:
Materials Technology Development, Advanced Micro Devices, Sunnyvale, CA 94088-3453

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 560 - 561

DOI: https://doi.org/10.1017/S1431927602105472 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2002

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Marriage Of Focused and Broad Ion Beam: Sample Preparation Optimized for High Performance Analytical (S)TEM

Volume 8, Issue S02
Max V. Sidorov ^(a1)
DOI: https://doi.org/10.1017/S1431927602105472

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Marriage Of Focused and Broad Ion Beam: Sample Preparation Optimized for High Performance Analytical (S)TEM

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