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A Low-Noise, Two-Channel STEM EBIC Metrology System

Published online by Cambridge University Press:  22 July 2022

William A. Hubbard ,
Matthew Mecklenburg  and
B. C. Regan
William A. Hubbard*
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, CA, USA
Matthew Mecklenburg
Affiliation:
University of California Los Angeles and the California NanoSystems Institute, Los Angeles, USA
B. C. Regan
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, CA, USA University of California Los Angeles and the California NanoSystems Institute, Los Angeles, USA
*
*Corresponding author: [email protected]

Abstract

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Type
Science of Metrology with Electrons
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 794 - 795
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Copyright
Copyright © Microscopy Society of America 2022

References

Everhart, TE, Wells, OC, and Matta, RK, Proceedings of the IEEE, 52 (1964). p. 1642–164710.1109/PROC.1964.3460CrossRefGoogle Scholar
Hubbard, WA et al. , Physical Review Applied, 10 (2018), p. 04406610.1103/PhysRevApplied.10.044066CrossRefGoogle Scholar
Mecklenburg, M et al. , Ultramicroscopy, 207 (2019), p. 112852.10.1016/j.ultramic.2019.112852CrossRefGoogle Scholar
Hubbard, WA et al. , Applied Physics Letters 115 (2019), p. 133502.10.1063/1.5117055CrossRefGoogle Scholar
Hubbard, WA et al. , Advanced Functional Materials 32 (2022), p. 2102313.10.1002/adfm.202102313CrossRefGoogle Scholar
Hubbard, WA, et al. Microscopy and Microanalysis 26 (2020), p. 3124–3125.10.1017/S1431927620023880CrossRefGoogle Scholar
This material is based upon work supported by the Defense Microelectronic Activity under Contract No. HQ072721C0002.Google Scholar