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Low Energy X-Ray Detection with a Silicon Multi-Cathode Detector for Microanalysis

Published online by Cambridge University Press:  31 July 2006

S Barkan
Affiliation:
SII NanoTechnology USA,Inc.
V Saveliev
Affiliation:
SII NanoTechnology USA,Inc.
C Tull
Affiliation:
SII NanoTechnology USA,Inc.
L Feng
Affiliation:
SII NanoTechnology USA,Inc.
M Takahashi
Affiliation:
SII NanoTechnology USA,Inc.
N Matsumori
Affiliation:
SII NanoTechnology USA,Inc.
D Newbury
Affiliation:
National Institute of Standards and Technology
J Small
Affiliation:
National Institute of Standards and Technology
J Iwanczyk
Affiliation:
Photon Imaging,Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America