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Low Dose-Rate High-Resolution Transmission Electron Microscopy of Group III – Nitride Electronic Device Structures Using a Direct Electron Detector

Published online by Cambridge University Press:  05 August 2019

P. Specht ,
R. Kirste ,
Z. Sitar  and
C. Kisielowski
P. Specht
Affiliation:
University of California, Berkeley, Dept. of Materials Science & Engineering, Berkeley, CA, USA.
R. Kirste
Affiliation:
NC State University, Dept. of Materials Science & Engineering, Raleigh, NC, USA.
Z. Sitar
Affiliation:
NC State University, Dept. of Materials Science & Engineering, Raleigh, NC, USA.
C. Kisielowski
Affiliation:
Lawrence Berkeley National Laboratory, Molecular Foundry, Berkeley, CA, USA.

Abstract

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Type
Revealing the Fundamental Structure of Soft and Hard Matter by Minimizing Beam-Sample Interactions
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1714 - 1715
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]McMullan, G et al. , Ultramicroscopy 147 (2014), p. 156.Google Scholar
[2]Zhang, D et al. , Science 359 (2018), p. 675.Google Scholar
[3]Kisielowski, C et al. , Physical Review B 88 (2013), p. 024305.Google Scholar
[4]Work at the Molecular Foundry was supported by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.Google Scholar