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Local Stress Assessment in Patterned Interlayer Dielectric Films using Cathodoluminescence Spectroscopy

Published online by Cambridge University Press:  31 July 2006

S Kakinuma ,
M Kodera ,
K Nishikata ,
J Aoyama ,
Y Saijo  and
G Pezzotti
S Kakinuma
Affiliation:
HORIBA,Ltd.
M Kodera
Affiliation:
Toshiba Co.
K Nishikata
Affiliation:
HORIBA,Ltd.
J Aoyama
Affiliation:
HORIBA,Ltd.
Y Saijo
Affiliation:
HORIBA,Ltd.
G Pezzotti
Affiliation:
Kyoto Institute of Technology

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1508 - 1509
Copyright
© 2006 Microscopy Society of America