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Lateral Resolution Enhancement of Vertical Scanning Interferometry by Sub-Pixel Sampling

Published online by Cambridge University Press:  07 January 2014

Rolf S. Arvidson ,
Cornelius Fischer ,
Dale S. Sawyer ,
Gavin D. Scott ,
Douglas Natelson  and
Andreas Lüttge
Rolf S. Arvidson*
Affiliation:
MARUM/Geowissenschaften FB5, Klagenfurter Straße, Universität Bremen, 28359 Bremen, Germany Department of Earth Science MS-126, Rice University, 6100 Main Street, Houston, TX 77005, USA
Cornelius Fischer
Affiliation:
MARUM/Geowissenschaften FB5, Klagenfurter Straße, Universität Bremen, 28359 Bremen, Germany Department of Earth Science MS-126, Rice University, 6100 Main Street, Houston, TX 77005, USA
Dale S. Sawyer
Affiliation:
Department of Earth Science MS-126, Rice University, 6100 Main Street, Houston, TX 77005, USA
Gavin D. Scott
Affiliation:
Bell Laboratories, Alcatel-Lucent, 600 Mountain Avenue, Murray Hill, NJ 07974, USA Department of Physics and Astronomy, Rice University, Houston, TX 77005, USA
Douglas Natelson
Affiliation:
Department of Physics and Astronomy, Rice University, Houston, TX 77005, USA
Andreas Lüttge
Affiliation:
MARUM/Geowissenschaften FB5, Klagenfurter Straße, Universität Bremen, 28359 Bremen, Germany Department of Earth Science MS-126, Rice University, 6100 Main Street, Houston, TX 77005, USA
*
*Corresponding author. E-mail: [email protected]
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Abstract

We apply common image enhancement principles and sub-pixel sample positioning to achieve a significant enhancement in the spatial resolution of a vertical scanning interferometer. We illustrate the potential of this new method using a standard atomic force microscope calibration grid and other materials having motifs of known lateral and vertical dimensions. This approach combines the high vertical resolution of vertical scanning interferometry and its native advantages (large field of view, rapid and nondestructive data acquisition) with important increases in lateral resolution. This combination offers the means to address a common challenge in microscopy: the integration of properties and processes that depend on, and vary as a function of observational length.

Keywords

vertical scanning interferometryoptical microscopylateral resolutionsuperresolutionsub-pixel
Type
Techniques, Software, and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 20 , Issue 1 , February 2014 , pp. 90 - 98
Copyright
Copyright © Microscopy Society of America 2014 

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