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Issues Affecting Quantitative Evaluation of Dopant Profiles Using Electron Holography

Published online by Cambridge University Press:  21 July 2003

M. R. McCartney ,
Jing Li ,
Partha Chakraborty ,
L. A. Giannuzzi  and
S. M. Schwarz
M. R. McCartney
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
Jing Li
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
Partha Chakraborty
Affiliation:
Department of Electrical Engineering, Arizona State University, Tempe, AZ 85287-5706
L. A. Giannuzzi
Affiliation:
Mech. Materials & Aerospace Eng., University of Central Florida, Orlando, FL 32816-2450
S. M. Schwarz
Affiliation:
Mech. Materials & Aerospace Eng., University of Central Florida, Orlando, FL 32816-2450

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 776 - 777
Copyright
Copyright © Microscopy Society of America 2003