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Ion-Irradiated Damage in Semiconductors Visualized by Means of Low-kV Scanning Electron Microscopy

Published online by Cambridge University Press:  05 August 2019

Iwona Jozwik ,
Adam Barcz ,
Ewa Dumiszewska  and
Elzbieta Dabrowska
Iwona Jozwik
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland National Centre for Nuclear Research, NOMATEN Centre of Excellence, Swierk-Otwock, Poland
Adam Barcz
Affiliation:
Institute of Electron Technology/Institute of Physics PAS, Warsaw, Poland
Ewa Dumiszewska
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland
Elzbieta Dabrowska
Affiliation:
Institute of Electronic Materials Technology, Warsaw, Poland

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 486 - 487
Copyright
Copyright © Microscopy Society of America 2019 

References

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[8]The authors acknowledge funding from the National Science Centre, Poland, Grant Number 2017/27/B/ST8/01158.Google Scholar