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Investigation of slice thickness for FIB tomography in a plasma focused ion beam system

Published online by Cambridge University Press:  01 August 2018

Brandon Van Leer ,
Ron Kelley  and
Bartlomiej Winiarski
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124 USA
Ron Kelley
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124 USA
Bartlomiej Winiarski
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 1282/12, 627 00 Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 858 - 859
Copyright
© Microscopy Society of America 2018 

References

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