Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-28T08:13:59.460Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigation of Metal-Assisted Chemical Etching for Fabrication of Silicon-Based X-Ray Zone Plates

Published online by Cambridge University Press:  10 August 2018

Rabia Akan ,
Karolis Parfeniukas ,
Carmen Vogt ,
Muhammet S. Toprak  and
Ulrich Vogt
Rabia Akan
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Karolis Parfeniukas
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Carmen Vogt
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Muhammet S. Toprak
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Ulrich Vogt*
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
*
* Corresponding author, [email protected]

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 286 - 287
Copyright
© Microscopy Society of America 2018 

References

[1] Huang, Z., et al, Adv. Mater. 23 2011 285–308.CrossRefGoogle Scholar
[2] Chang, C. Sakdinawat, A. Nat. Commun. 5 2014 1–7.Google Scholar
[3] Li, K., et al, J. Vac. Sci. Technol. B 35 2017 06G901.CrossRefGoogle Scholar
[4] Parfeniukas, K., et al, Proc. SPIE 10386 2017 103860S.Google Scholar
[5] Akan, R., et al, RSC Adv. Accepted Manuscript 2018.Google Scholar