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The Investigation of Chemical Shift of Silicon X-ray Energy in Different Stoichiometry or Structure with Microcalorimeter EDS

Published online by Cambridge University Press:  25 July 2016

LiLung Lai ,
Matthew H. Carpenter ,
Robin Cantor  and
Hideo Naito
LiLung Lai
Affiliation:
Semiconductor Manufacturing International (Shanghai) Corp, SH, China
Matthew H. Carpenter
Affiliation:
STAR Cryoelectronics, Santa Fe, NM, USA
Robin Cantor
Affiliation:
STAR Cryoelectronics, Santa Fe, NM, USA
Hideo Naito
Affiliation:
H.K.N. Inc. Nanotechnology Marketing, CA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 432 - 433
Copyright
© Microscopy Society of America 2016 

References

References:

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