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Investigation of Ar Ion-Milling Rates for Transmission Electron Microscopy Specimens

Published online by Cambridge University Press:  23 September 2015

Min-Hee Lee  and
Kyou-Hyun Kim
Min-Hee Lee
Affiliation:
Advanced Process and Materials R&BD Group, Incheon Regional Division, Korea Institute of Industrial Technology, Incheon 406-840, Republic of Korea
Kyou-Hyun Kim
Affiliation:
Advanced Process and Materials R&BD Group, Incheon Regional Division, Korea Institute of Industrial Technology, Incheon 406-840, Republic of Korea

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1981 - 1982
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Mayer, J., et al, MRS Bulletin 32 (2007) 400–407.Google Scholar
[2] Doyle, P. A. & Turner, P. S., Acta Crystallogr. Sect A24 (1968) 390–397.Google Scholar
[3] Bird, D. M. & King, Q.A., ActaCrystallogr. Sect A46 (1990) 202–208.Google Scholar
[4] This work was supported by the research fund from Korea Institute of Industrial Technology (KITECH)..Google Scholar